Micro Electromechanical Systems

Micro Electromechanical Systems (Hardcover)

By Dilip Kumar Bhattacharya , Brajesh Kumar Kaushik 
Publisher: CL India
Edition: Hardcover
Language: English
EAN: 9788131525883
No. of Pages: 282
Publish Date: 2014-1-1
Binding: Hardcover
Ships to India.

Description

About the Book

This book presents an in-depth study of Microelectromechanical system (MEMS) with their applications in the area of microelectronics and microsystems. Different MEMS processing steps such as oxidation, ion implantation, diffusion, chemical vapor deposition, epitaxy, and photolithography are thoroughly discussed. An extensive explanation of MEMS actuators and MEMS sensors covers broader area of research and applications that caters to the need of wider domain of readers. The device- and process-level TCAD simulations provide a systematic understanding of device performance before an actual fabrication. Moreover, a detailed study of different MEMS-based systems such as microaccelerometers, micromotors, micropumps, microvalves, microfluidics, and RF MEMS addresses the current requirements of MEMS designers

About the Author

Dilip Kumar Bhattacharya
Dilip Kumar Bhattacharya is a practising research scientist with nearly three decades of experience in the field of semiconductor devices and materials. He is a senior scientist with Solid State Physics Laboratory, Delhi. He currently heads the ion-implantation, hydrophone, and the instrumentation groups at Solid State Physics Laboratory. He has had a long association with MEMS group of the laboratory. He has over 50 publications in international journals and conference/workshop proceedings.

Brajesh Kumar Kaushik
Brajesh Kumar Kaushik is currently working as Associate Professor in Department of Electronics and Communication Engineering, Indian Institute of Technology Roorkee, Roorkee. Dr Kaushik completed his PhD from Indian Institute of Technology Roorkee in 2007. Dr Kaushik has authored more than 60 papers in peer-reviewed international journals and over 80 papers in international conferences. Dr Kaushik is Editor-in-Chief of International Journal of VLSI Design and Communication System (VLSICS), AIRCC Publishing Corporation. He also holds the position of Editor of Microelectronics Journal (MEJ), Elsevier Inc.; Journal of Engineering, Design and Technology (JEDT), Emerald Group Publishing Limited; and Journal of Electrical and Electronics Engineering Research (JEEER), Academic Journals.

Table of Contents
  1. Background of MEMS
  2. MEMS Processing I
  3. MEMS Processing II
  4. MEMS Materials
  5. MEMS Sensors
  6. Actuators
  7. Design and Simulation of MEMS
  8. MEMS Applications
  9. MEMS Systems
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Specification

Title: Micro Electromechanical Systems
Publisher: CL India
Author: Dilip Kumar Bhattacharya , Brajesh Kumar Kaushik
Edition: Hardcover
Language: English
EAN: 9788131525883
No. of Pages: 282
Publish Date: 2014-1-1
Binding: Hardcover

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