Micro Electromechanical Systems

Micro Electromechanical Systems (Hardcover)

By Dilip Kumar Bhattacharya , Brajesh Kumar Kaushik 
Publisher: CL India
Edition: Hardcover
Language: English
EAN: 9788131525883
No. of Pages: 282
Publish Date: 2014-1-1
Binding: Hardcover
Ships to India.


About the Book

This book presents an in-depth study of Microelectromechanical system (MEMS) with their applications in the area of microelectronics and microsystems. Different MEMS processing steps such as oxidation, ion implantation, diffusion, chemical vapor deposition, epitaxy, and photolithography are thoroughly discussed. An extensive explanation of MEMS actuators and MEMS sensors covers broader area of research and applications that caters to the need of wider domain of readers. The device- and process-level TCAD simulations provide a systematic understanding of device performance before an actual fabrication. Moreover, a detailed study of different MEMS-based systems such as microaccelerometers, micromotors, micropumps, microvalves, microfluidics, and RF MEMS addresses the current requirements of MEMS designers

About the Author

Dilip Kumar Bhattacharya
Dilip Kumar Bhattacharya is a practising research scientist with nearly three decades of experience in the field of semiconductor devices and materials. He is a senior scientist with Solid State Physics Laboratory, Delhi. He currently heads the ion-implantation, hydrophone, and the instrumentation groups at Solid State Physics Laboratory. He has had a long association with MEMS group of the laboratory. He has over 50 publications in international journals and conference/workshop proceedings.

Brajesh Kumar Kaushik
Brajesh Kumar Kaushik is currently working as Associate Professor in Department of Electronics and Communication Engineering, Indian Institute of Technology Roorkee, Roorkee. Dr Kaushik completed his PhD from Indian Institute of Technology Roorkee in 2007. Dr Kaushik has authored more than 60 papers in peer-reviewed international journals and over 80 papers in international conferences. Dr Kaushik is Editor-in-Chief of International Journal of VLSI Design and Communication System (VLSICS), AIRCC Publishing Corporation. He also holds the position of Editor of Microelectronics Journal (MEJ), Elsevier Inc.; Journal of Engineering, Design and Technology (JEDT), Emerald Group Publishing Limited; and Journal of Electrical and Electronics Engineering Research (JEEER), Academic Journals.

Table of Contents
  1. Background of MEMS
  2. MEMS Processing I
  3. MEMS Processing II
  4. MEMS Materials
  5. MEMS Sensors
  6. Actuators
  7. Design and Simulation of MEMS
  8. MEMS Applications
  9. MEMS Systems
show moreless


Title: Micro Electromechanical Systems
Publisher: CL India
Author: Dilip Kumar Bhattacharya , Brajesh Kumar Kaushik
Edition: Hardcover
Language: English
EAN: 9788131525883
No. of Pages: 282
Publish Date: 2014-1-1
Binding: Hardcover


  • The book summary and image may be of a different edition or binding of the same title.
  • Book reviews are added by registered customers. They need not necessarily buy book.
  • These books are NOT available for reading online or for free download in PDF or ebook format.
  • Price can change due to reprinting, price change by publisher or sourcing cost change for imported books.
  • www.infibeam.com/Books is the biggest online bookstore in India for sale of books at best price - fiction, literature, audiobooks, study guides, novels, story books, rare books, textbooks and books by popular authors. These are available in various editions and bindings e.g. paperback and at best discount.
  • For the imported title, once the order gets placed ,it can’t be cancelled

Great Value

Safe Payment

Shop With

Help Center

Free & Easy Return

Get Discounts & Offers
Stay Connected

Popular Searches on Infibeam.com

Online Shopping: Deal of The Day / Hot Deals / Best Deals / Offers

Apple iPhones: Iphone Xs Max / Iphone Xs / Iphone XR / iPhone 8 / iPhone 8 / iPhone 7 / iPhone 7 Plus / iPhone 6s / iPhone 5s

Mobile Phones:Unboxed Mobiles / Apple Mobiles / Samsung Mobiles / Micromax Mobiles / Sony Mobiles / Intex Mobiles / Latest Mobiles / Smartphones / 4G Phones / 3G Phones

Computers:Dell Laptops / Lenovo Laptops / Acer Laptops / HP Laptops / External Hard Disks / Pen Drives / Monitors / Softwares / Printers

Appliances:Air Conditioners / Air Coolers / Refrigerators / Geysers / Room Heaters / Immersion Rod / Water Purifiers / Washing Machines / Microwaves & OTG / Air Purifier

Electronics: Tablets / Cameras / Headphones / Power Bank / LED TVs / Gaming Consoles / Speakers / Tablet Accessories / Memory Cards

Men's Clothing: Shirts / T-Shirts / Tracksuits / Trousers / Ethnic Wear / Men's Denim / Cargo Shorts / Tees & Polos / Suits & Blazer

Women's Clothing: Dress Materials / Salwar Suits / Women Sarees / Kurtas & Kurtis / Leggings / Lingerie / Night Suits & Nighties / Women Shorts / Tops

Fashion:Men's Shoes / Women's Footwear / Fastrack Watches / Titan Watches / Timex Watches / Bags / Jewellery / Fastrack Sunglasses / Perfumes & Deodorants / Fashion Accessories

Online Book Store:Best Sellers Books / Business Books / History and Politics / Academic and Professional / Competitive Exams / Biographies and Autobiographies

Best Ecommerce Platform:Online Store Builder / Create Online Store / Best Ecommerce Solutions / Sell Online / Ecommerce Marketing Blog

Ecommerce Website Templates:Free Website Templates / Free Logo Design / SEO Audit Report / Theme Store / Wordpress Themes / Web & App Development Company

Copyright © 2007-2019 Infibeam.com and Affiliates
Site is up